Clean rooms are classified according to the cleanliness of the air. Specific particle count measurements and calculations are required by the clean room classification standard ISO 14644-1, which specifies the decimal logarithm of the number of particles of 0.1 µm or more allowed per cubic meter of air to classify the cleanliness level of the clean room or clean area.
ISO 14644-1 Clean room Standards
|
Class |
maximum particles/m3 |
FED STD 209E |
|||||
|
>=0.1 µm |
>=0.2 µm |
>=0.3 µm |
>=0.5 µm |
>=1 µm |
>=5 µm |
||
|
ISO 1 |
10 |
2 |
|
|
|
|
|
|
ISO 2 |
100 |
24 |
10 |
4 |
|
|
|
|
ISO 3 |
1,000 |
237 |
102 |
35 |
8 |
|
Class 1 |
|
ISO 4 |
10,000 |
2,370 |
1,020 |
352 |
83 |
|
Class 10 |
|
ISO 5 |
100,000 |
23,700 |
10,200 |
3,520 |
832 |
29 |
Class 100 |
|
ISO 6 |
1,000,000 |
237,000 |
102,000 |
35,200 |
8,320 |
293 |
Class 1,000 |
|
ISO 7 |
|
|
|
352,000 |
83,200 |
2,930 |
Class 10,000 |
|
ISO 8 |
|
|
|
3,520,000 |
832,000 |
29,300 |
Class 100,000 |
|
ISO 9 |
|
|
|
35,200,000 |
8,320,000 |
293,000 |
Room Air |
Clean room is a controlled environment with low pollutant level. It is usually used in electronic manufacturing, food production, medical product research and scientific laboratory.
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